Design and Analysis of Piezoelectric MEMS Resonator

Abstract

This project focuses on the design and analysis of a Piezoelectric MEMS resonator using COMSOL Multi physics. The primary objective is to investigate how shape and dimensional variations influence the resonant frequency of the resonator. Three geometries rectangular, square, and circular, were modeled using extensional (length and width-based) configurations under identical material properties and boundary conditions. The piezoelectric layer was modeled with appropriate electrical and structural coupling to simulate realistic device behavior. For each geometry, eigen frequency analysis was performed to determine the fundamental resonant frequencies. A comparative study was then conducted to identify the geometry that offers the highest resonant frequency. Among the designs, the circular resonator exhibited the highest resonant frequency, demonstrating its suitability for high-frequency MEMS applications.

Introduction

Micro-Electro-Mechanical Systems (MEMS) resonators, especially piezoelectric types, are vital for modern high-frequency electronics due to their precision, compactness, and CMOS compatibility. This project investigates how the geometry of piezoelectric MEMS resonators—rectangular, square, and circular—affects their resonant frequency and quality factor using COMSOL Multiphysics simulations under identical material and boundary conditions.

The study shows that circular resonators outperform others, exhibiting the highest resonant frequencies thanks to uniform stress distribution and radial symmetry. Square resonators have moderate frequencies influenced by directional stiffness, while rectangular resonators yield the lowest frequencies due to their elongated structure reducing stiffness. These findings are crucial for optimizing MEMS designs for applications in 5G/6G, IoT, and biomedical implants.

A literature survey highlighted advances in materials, fabrication, and design, emphasizing that both material choice and geometry critically impact MEMS resonator performance. Simulation results closely match theoretical predictions, validating the models. Overall, circular piezoelectric MEMS resonators are identified as the optimal geometry for high-frequency, miniaturized RF applications.

Conclusion

This study demonstrated that the geometry of a MEMS resonator has a significant impact on its resonant frequency and overall performance. Among the tested shapes, circular resonators offered the best performance. These findings can guide future MEMS designs for applications requiring high-frequency operation and compact integration. Future research can explore multimode and tunable resonators, integration with advanced materials like Sc-doped AlN, and fabrication of the proposed designs for experimental validation. AI-assisted design and optimization may also enhance performance and reduce development time. Piezoelectric MEMS resonators with circular, square, and rectangular geometries show strong potential for compact, high-performance RF filters in next-generation wireless systems. Future research can focus on optimizing geometry and electrode design to enhance filter sharpness and reduce insertion loss. Circular resonators, with their high resonant frequency and isotropic response, are ideal for multi-band and reconfigurable RF applications. Material innovations like Sc-AlN or PZT and improved fabrication methods can boost frequency stability and reduce energy losses. Integrating diverse resonator geometries on a single chip may enable adaptive filter arrays for 5G, 6G, and satellite communications.

References

[1] Piazza, G., Stephanou, P. J., & Pisano, A. P. (2006). Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators. Journal of Microelectromechanical Systems, 15(6), 1406–1418. [2] Ruby, R. (2008). Micromachined acoustic resonators and filters: What works, what doesn’t, and why. IEEE Ultrasonics Symposium, 2008, 582–589. [3] Lin, Y. W., Nguyen, C. T.-C. (2005). Transceiver front-end architectures using vibrating micromechanical signal processors. IEEE International Solid-State Circuits Conference (ISSCC), 388–389. [4] Wang, Y., Jeong, H. Y., & Lee, H. J. (2019). Design and analysis of piezoelectric MEMS resonators with circular and rectangular geometries. Microsystem Technologies, 25(3), 947–954. [5] Abdolvand, R., & Ayazi, F. (2005). An advanced SOI MEMS resonator platform with reduced thermomechanical noise. IEEE International Conference on Micro Electro Mechanical Systems, 805–808. [6] Nguyen, C. T.-C. (2007). MEMS technology for timing and frequency control. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54(2), 251–270. [7] Pourkamali, S., & Ayazi, F. (2004). Electrically coupled MEMS bandpass filters: Part I – With coupling element. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 51(9), 1309–1318. [8] Zhang, W., & Turner, K. L. (2005). Application of parametric resonance amplification in a singlecrystal silicon micromechanical resonator. Sensors and Actuators A: Physical, 122(1), 23–30. [9] COMSOL Multiphysics® User Guide. (2022). Piezoelectric Devices Module – Resonator Modeling Examples. COMSOL Documentation Portal. [10] Bhugra, H., & Piazza, G. (2017). Piezoelectric MEMS Resonators. Springer Series in Advanced Microelectronics.

Copyright

Copyright © 2025 Dr. M. Vasu Babu, Kasani Shivasaikrishna, Mekala Shivudu, MD. Baleegh Alam Khan, S. Sai Lekhith. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.